![]() It was shown that the proposed method enables the extraction of information on the composition of the surface layer of the investigated film and the development of an on-line inspection, without extracting the film from the sputtering chamber. The gas pressure in the discharge tube used for sputtering varied between 1 and 10 Torr, and the current was between 10 and 50 mA. The applied concentrations of CH4 varied in the range of 2–8%, and He concentration was 80–90%. The mixture N2:CH4:He was used in the process of sputtering. density of krypton is equal to 3.7493 kg/m³ at 0☌ (32☏ or 273.15K) at standard atmospheric pressure.In Imperial or US customary measurement system, the density is equal to 0.23406 pound per cubic foot lb/ft³, or 0. The electron energy distribution function is determined by the means of a single Langmuir probe placed in the center of the discharge tube. Krypton Atomic Number: 36: Symbol: Kr: Element Category: Noble Gas: Phase at STP: Gas: Atomic Mass amu 83.798: Density at STP g/cm3 3. Krypton weighs 0.0037493 gram per cubic centimeter or 3.7493 kilogram per cubic meter, i.e. 4p6 and the term symbol of krypton is 1S0. The ground state electronic configuration of neutral krypton is Ar. ![]() A colorless, odorless, tasteless noble gas. Krypton atoms have 36 electrons and the shell structure is 2.8.18.8. ![]() It is a member of group 18 (noble gases) elements. The plasma-electron spectroscopy method based on the Penning ionization process analysis is developed here to control this ratio in CNx films produced by plasma-sputtering in a pulsed-periodic regime of glow discharge. Krypton is a chemical element with symbol Kr and atomic number 36. ![]() It was found that these qualities depend on the N/C ratio therefore, the possibility to control it in situ in the sputtered film is of high importance. Density is defined as the mass per unit volume. Carbon nitride materials have received much attention due to their excellent tribological, mechanical and optical properties. Typical densities of various substances at atmospheric pressure. ![]()
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